Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools
Business Wire•13/10/2026•11:30 ET
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Key Highlights
- ➤Centra Smart Hub supports up to eight sensors for semiconductor equipment.
- ➤New system improves temperature measurement accuracy by up to 40%.
- ➤Centra measures Si and SiC processes at temperatures up to 1700°C.
- ➤Hub-and-spoke architecture enables real-time wafer-temperature control and repeatability.
- ➤Embedded ECAT and Ethernet protocols support faster system integration and applications.
Expert Statements
Juergen Braun, Executive Vice President of Plasma Power at Advanced Energy
“Advanced Energy’s new Centra Smart Hub and Remote Smart Sensors deliver industry-leading performance to meet today’s process requirements along with a new architecture for semiconductor processing systems.”
Juergen Braun, Executive Vice President of Plasma Power at Advanced Energy
“The Centra Smart Hub enables temperature measurement for Si and SiC processes to help fabs improve wafer-to-wafer repeatability and thermal uniformity for higher yields.”
Advanced Energy Unveils Centra Smart Hub for Improved Temperature Measurement in Next-Generation Semiconductor Tools
New Centralized Hub Supports up to Eight Sensors for Precise, Repeatable, Non-Contact Temperature Measurement in Space-Constrained Semiconductor Equipment
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